MICRO NANO FABRICATION FOR IN OPERANDO MULTIFUNCTIONAL DEVICES

Work package:
With the rapid development of miniaturization of devices, such as the feature size of the transistor building block of the semiconductor industry below 5 nm, this scaling down is opening new possibilities to explore remarkable properties at this scale. In the cleanroom of the CEMES laboratory, this project aims to develop custom multifunctional devices by nano-manufacturing processes with nanostructured materials or nano-objects for various applications (optics, electronic, spintronic, gas sensing...). The goal will be to refine the nanofabrication steps to build up the device on a very thin silicon-based membrane, allowing both physical properties measurements and a direct imaging by transmission electron microscopy (TEM) to get the structural properties. It will allow to correlate both physical and structural properties, and more interestingly, to perform in-situ TEM investigations while measuring electrical properties for instance. The candidate will be involved in all of the experimental aspects of the micro-nanofabrication of the device: (i) to develop the technology process flow and adapt it (ii) to conduct the electrical characterization under adequate stimuli (various gaseous atmosphere, magnetic field, external light stimuli ...), and (iii) to perform the structural characterization of the device obtained by the adapted techniques. Micro-nanofabrication of the devices will involve clean room techniques such as laser lithography, electronic lithography, thin layer deposit and etching or lift-off for the fabrication of the complete device. Among the process flows studied, Si3N4 based membrane will be explored with a thin silicon nitride membrane allowing high-temperature operation and real time in-situ SEM or TEM microscopy or gas sensing under UV light illumination on WO3 nanowires-based device.